| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-507
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45519
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45551
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02315
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4584
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02252
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3141
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45538 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2015-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2018-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101885411-B1 |
| titleOfInvention |
Substrate processing method and substrate processing apparatus |
| abstract |
A plasma processing method comprising: supplying a processing gas to a substrate; supplying a separation gas to the substrate; and supplying a first plasma processing gas to the substrate in a state where a distance between the first plasma generating means and the rotation table is a first distance A step of supplying a second plasma processing gas to the substrate in a state that the distance between the second plasma generating means and the rotary table is a second distance smaller than the first distance; A method for processing a substrate having a process of supplying gas. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022173695-A1 |
| priorityDate |
2014-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |