| abstract |
(57) [PROBLEMS] To overcome the resolution limit of screen printing by integrating an ink jet head using a silicon substrate. In addition, a material / method for producing a piezoelectric layer having good characteristics is provided. SOLUTION: An intermediate layer, a first electrode layer, an electromechanical conversion material layer (piezoelectric layer) are formed on a Si substrate of an ink jet head. Are laminated in this order, and an interlayer insulating layer for insulating between the layers is provided thereon, and a second electrode is laminated on the piezoelectric layer via a contact hole of the interlayer insulating layer. Further, the material and the manufacturing method of the piezoelectric layer are appropriate. |