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grantDate 2014-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2014-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8857020-B2
titleOfInvention Actuators and methods of making the same
abstract A method of forming an actuator includes depositing a photoimageable material to form a first photoimageable layer on a piezoelectric layer; patterning the first photoimageable layer to form an aperture; and disposing a first conductive layer on the first photoimageable layer. An actuator device formed by this method includes the photoimageable material. The first conductive layer partially overlies the first photoimageable layer such that a first portion of the first conductive layer contacts the first photoimageable layer and a second portion of the first conductive layer electrically contacts the piezoelectric layer in the aperture.
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Total number of triples: 38.