Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_20c79af218ad2f4f952f6b6ee3ecfe5d http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dbebbd69ed785440de260847e2aaad01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de6d6913189711823dfcb4ae9871e6b9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c78dc8bf0c8177a03f89df7a2745f8a2 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49156 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49401 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1623 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1629 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1628 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1631 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1645 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1643 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1646 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-161 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 |
filingDate |
2009-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2014-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_76db553779abfbcc481dd714d3dcf671 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d00b1e4787ce3bdbae8add51a2d7e603 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea2e7c674a3900ef51b7eb105734b918 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac0936f51b4784a21ecd63aeae592dda |
publicationDate |
2014-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-8857020-B2 |
titleOfInvention |
Actuators and methods of making the same |
abstract |
A method of forming an actuator includes depositing a photoimageable material to form a first photoimageable layer on a piezoelectric layer; patterning the first photoimageable layer to form an aperture; and disposing a first conductive layer on the first photoimageable layer. An actuator device formed by this method includes the photoimageable material. The first conductive layer partially overlies the first photoimageable layer such that a first portion of the first conductive layer contacts the first photoimageable layer and a second portion of the first conductive layer electrically contacts the piezoelectric layer in the aperture. |
priorityDate |
2008-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |