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publicationDate 2004-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2004021005-A1
titleOfInvention Plurality of barrier layers
abstract A fluid ejection device comprises a substrate having a first surface; a fluid ejector formed over the first surface; and a cover layer defining a firing chamber formed about the fluid ejector, and defining a nozzle over the firing chamber. The cover layer is formed by at least two SU8 layers.
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