http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006229154-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_905122d8678a831c0f8af203f34145dc |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-135 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-055 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-314 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N2-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-14 |
| filingDate | 2005-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_773c9a2c17545bef5d7d37b0073133c0 |
| publicationDate | 2006-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006229154-A |
| titleOfInvention | Piezoelectric actuator, inkjet head, and manufacturing method thereof |
| abstract | PROBLEM TO BE SOLVED: To provide a piezoelectric actuator, an ink jet head, and a manufacturing method thereof that can improve adhesion of an electrode layer. An adhesion layer 3 made of the same PZT as a material constituting a piezoelectric layer 5 is formed on a diaphragm 2 by an aerosol deposition method. At this time, the particles of PZT, which is a ceramic material, are relatively hard and are sunk into the diaphragm 2 by the impact of a collision, so that the adhesion layer 3 is in close contact with the diaphragm 2. Then, the lower electrode 4 is formed on the adhesion layer 3, and the piezoelectric layer 5 is overlaid thereon. At this time, the lower electrode 4 is provided in a region corresponding to the opening 16A of the pressure chamber 16, and an exposed region 3A in which the adhesion layer 3 is exposed is provided on the periphery thereof. When the piezoelectric layer 5 is laminated thereon, the piezoelectric layer 5 is directly laminated on the adhesion layer 3 in the exposed region 3 and integrated with the adhesion layer 3. Accordingly, the lower electrode 4 is confined and firmly fixed in the ceramic layer composed of the adhesion layer 3 and the piezoelectric layer 5. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7220328-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014155350-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010076864-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008195996-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008244201-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010116802-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9186898-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008062388-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8941290-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9818927-B2 |
| priorityDate | 2005-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.