| abstract |
A piezoelectric actuator including a piezoelectric film having good piezoelectric characteristics is provided. A piezoelectric film 40 in a piezoelectric actuator 100 is made of a Pb (Ni 1/3 Nb 2/3 ) O 3 —PbZrO 3 —PbTiO 3 system material and has an average particle diameter of 0.2 μm to 2.0 μm. It was made of a crystal having it. In the case where the substrate 10 may react with the piezoelectric film 40, for example, a diffusion barrier layer 20 such as an oxide film or a nitride film is formed on the substrate 10 on the surface of the substrate 10. [Selection] Figure 1 |