| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0605
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-021 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23B27-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C28-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 |
| filingDate |
1995-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c12f4066cce0226e28ca4330af5b5f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d100166d2df716069bf40e8f187bb1ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64113a03110ea35c7cb28dd8555ee48a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2dc50f60ee6ca8ce88dfe016ff33ccd |
| publicationDate |
1997-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H0987847-A |
| titleOfInvention |
Hard carbon coating method and wear resistant parts |
| abstract |
(57) [Abstract] [PROBLEMS] To provide a hard carbon coating having good adhesion for use in wear resistant parts, sliding parts and the like. In order to solve the above problems, the present invention is characterized in that a peak value of oxygen concentration is 10 at% or less at a bonding interface between a hard carbon coating and a surface treatment layer on a substrate. Produces a high adhesion hard carbon coating. While heating the substrate with the intermediate layer, the inside of the vacuum device 1 is evacuated by the exhaust device 6 and then the surface of the intermediate layer is cleaned, and then a hydrocarbon gas is introduced through the mass flow controller 7 to a predetermined hardness. A carbon coating is deposited on the intermediate layer 8. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011007653-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003269555-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009263769-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011158890-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8945690-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6516743-B2 |
| priorityDate |
1995-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |