| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242cc8d15c771395b920cc7de452da6a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03K3-57 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4587
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-515
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-503
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-515
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27 |
| filingDate |
2009-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd730bed5c790eb20ccc60a24ee09453
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fe5efe4c42606f7a2ce7a1be4be1a19 |
| publicationDate |
2009-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009263769-A |
| titleOfInvention |
DLC film mass production method and apparatus |
| abstract |
A DLC film having good characteristics is simultaneously formed on a plurality of plate-like substrates with a small apparatus. In a DLC film mass production apparatus, a chamber is grounded. A plurality of plate-like substrates 60 are arranged in parallel at equal intervals without arranging counter electrodes facing the plate-like substrates 60 in the chamber 12. And after forming the sputtering cleaning by plasma discharge and the base adhesion layer on each plate-like substrate 60, the carbon source gas is introduced into the chamber 12 so that the internal pressure of the chamber 12 becomes 0.1 to 10 Pa, and each plate By applying a negative voltage of a direct current pulse having a pulse half-value width of 0.1 to 3 μsec all at once to the plate-like substrate 60, plasma is generated to generate a DLC film on each plate-like substrate 60. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015178670-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10145007-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110622280-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7235683-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020523786-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012233257-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012207243-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012144580-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015068655-A1 |
| priorityDate |
2008-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |