http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008042078-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c75a57c3359f361db66b025dad577ea1 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2006-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68396245aa375252ee036b89b467789c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2eda160bbcaf8c318d06a4f6dba55900 |
| publicationDate | 2008-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008042078-A |
| titleOfInvention | Tin removal method and apparatus |
| abstract | Provided is a method for removing tin from a member to which tin adheres, such as a reflecting mirror used in an extreme ultraviolet light source. A plasma containing hydrogen ions and rare gas ions is generated, and a voltage for accelerating the plasma is applied between the member and the ground so that a negative potential is applied to the tin adhesion member. As a result, the rare gas ions 22 are incident on the surface of the tin adhesion member 21 and physically sputter the tin 24, and the hydrogen ions 23 and the hydrogen radicals 25 cause the tin 24 to hydrogen embrittle on the surface of the tin adhesion member 21. Then, the tin 24 is removed from the surface of the tin adhesion member 21. The removed tin 24A reacts with the hydrogen plasma in the plasma to become tin tetrahydride 26 which is a gas. By removing this tin tetrahydride 26 by the exhaust device, it is possible to prevent tin from reattaching to the surface of the tin attachment member 21. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022179328-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2016157315-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010147214-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009263769-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019086397-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8901524-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012152855-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012506134-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012523106-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011023712-A |
| priorityDate | 2006-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.