| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_96a84102fef885d41b40e0f0b73afca5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e921ee19951b0c5a050e21f8ffaec9f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242cc8d15c771395b920cc7de452da6a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-515
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0272 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-515 |
| filingDate |
2010-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8debb41b785b986c91be0fce198aa7f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b06a4b0a1548a7dd0efae4d9b403d42 |
| publicationDate |
2011-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2011007653-A1 |
| titleOfInvention |
Method for producing diamond-like carbon film body. |
| abstract |
Disclosed is a method for producing a diamond-like carbon (DLC) film body with suppressed DLC film delamination. The method produces a DLC film body having a film hardness of at least 10 GPa. Before forming a DLC film, a substrate surface is pre-treated by means of discharge plasma, and a silicon carbide film intermediate layer is formed on the substrate surface. The pre-treatment of the substrate surface is performed by supplying into the chamber in which the substrate is contained a mixed gas that is a mixture of at least one volume part and no more than 10 volume parts of argon gas to every 100 volume parts of helium gas, and causing discharge plasma to be generated in the mixed gas, while adjusting the pressure within the chamber to be at least 20 hPa and no more than atmospheric temperature. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113186493-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017195448-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017195448-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113186493-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102496134-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170017890-A |
| priorityDate |
2009-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |