| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d5073c72837c69a4850d017e75290dd1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
1995-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_124f1aa9cd069b23564bcf50346a8c29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e24643e058c5d559c6596031342c70c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3839d6aea7fbc2ff493301d1e4bc02e8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d78ebbfacfbb2128120f35e8bbe0188a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d7459a3409644502b939d7df723fb7b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aae37427d6b8ca03cbf29355ff22b8c4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eae71302c4ab48b2b2ed380ec043e59c |
| publicationDate |
1997-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H0962008-A |
| titleOfInvention |
Composition for forming resist pattern and method for forming resist pattern |
| abstract |
(57) Abstract: [PROBLEMS] To provide a composition for preventing deterioration of various pattern dimensional accuracy in a pattern forming process and a pattern forming method using the composition. SOLUTION: The compound (a) having at least one pair of acidic group and basic group in the molecule and capable of forming a stable salt in the molecule and / or at least one pair of acidic groups in the molecule. A composition for resist pattern formation, comprising a polymer (b) having a group and a basic group, and these capable of forming a stable salt in the molecule. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100641082-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9046768-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160038772-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013051442-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4686393-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016069636-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007264118-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9550861-B2 |
| priorityDate |
1995-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |