| abstract |
The present invention relates to a method for producing a transparent barrier layer system. This is done in a vacuum chamber by depositing on the transparent plastic film at least two transparent barrier layers and one transparent intermediate layer arranged between the two barrier layers. Aluminum is vaporized to deposit the barrier layer, and at the same time, at least one first reactive gas is supplied into the vacuum chamber, and a silicon-containing layer is deposited by a PECVD process as an intermediate layer. |