http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007522343-A

Outgoing Links

Predicate Object
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-62
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-081
classificationIPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-00
filingDate 2004-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2007-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2007522343-A
titleOfInvention Method for producing ultra barrier film
abstract The present invention relates to a method of manufacturing an ultra-barrier thin film system by forming a laminated film on a substrate by vacuum thin film formation, and the laminated film is formed as an alternating film forming system composed of a smooth film and a transparent ceramic film. One smoothing film is included between two transparent ceramic films deposited by sputtering, and during deposition of the smoothing film, a monomer is put into a vacuum deposition chamber, and a magnetron plasma is formed in the deposition chamber. Actuate.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011519318-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010163662-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014515787-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011524468-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014517144-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007216435-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7898636-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011523977-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007083573-A
priorityDate 2004-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0815283-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0815283-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419519520
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425193155
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458434260
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24764
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23953
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID783
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947

Total number of triples: 44.