| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-54 |
| filingDate |
2014-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_098a707d3e7994b181d3da1339cce7f9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_505218b0894cc57fcc679b7e6d3bfd96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69cd0e6ad2f198d6998304489b1a8ee9 |
| publicationDate |
2014-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2014224993-A |
| titleOfInvention |
Resist composition and resist pattern forming method |
| abstract |
A resist composition and a resist pattern forming method are provided. A resist composition containing a base material component whose solubility in a developing solution is changed by the action of an acid and an acid generator component that generates an acid upon exposure. A resist composition in which the base material component includes a polymer compound having a structural unit represented by (a0-1), and the acid generator component includes a compound represented by (b1). [Chemical 1] [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016177202-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160113022-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102483494-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11204551-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180002048-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102358723-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018004775-A |
| priorityDate |
2013-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |