| abstract |
A resist composition comprising a resin component having a structural unit represented by the general formula (a0-1) and a compound represented by the general formula (b1). In formula (a0-1), R is a hydrogen atom, an alkyl group, or a halogenated alkyl group. Va 1 is a divalent hydrocarbon group. n a1 is an integer of 0-2. Ya 0 is a carbon atom. Xa 0 is a group forming a monocyclic aliphatic hydrocarbon group together with Ya 0 . Ra 00 is an aromatic hydrocarbon group or a specific unsaturated hydrocarbon group. In formula (b1), R b1 represents a cyclic hydrocarbon group. Y b1 represents a divalent linking group containing an ester bond. V b1 represents an alkylene group, a fluorinated alkylene group, or a single bond. M m+ represents an m-valent organic cation.] [Formula 1] |