http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014211541-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate | 2013-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53f7ea23cf4b332661286ec8817747d9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9473e6941c583ff6ee73ad721e18287 |
| publicationDate | 2014-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014211541-A |
| titleOfInvention | Method for forming fine pattern |
| abstract | An object of the present invention is to provide a fine pattern forming method capable of forming a resist pattern and an inorganic pattern having a small LWR and a good shape and forming a good pattern on a substrate to be processed. The present invention includes (1) a step of applying a photoresist composition on a substrate to be processed to form a resist film, (2) a step of exposing the resist film, and (3) the exposed resist. The step of developing the film with a developer containing an organic solvent to form a negative resist pattern, (4) the step of forming an inorganic layer so as to cover the resist pattern surface, and (5) the inorganic layer A method of forming a fine pattern comprising: a step of etching back to remove a portion other than the portion formed on the sidewall of the resist pattern; and (6) a step of removing the resist pattern to form an inorganic pattern. [Selection] Figure 1 |
| priorityDate | 2013-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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