http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014156586-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D307-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D313-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D307-33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-28 |
| filingDate | 2013-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcb142bcea5ae883356b016617eda596 |
| publicationDate | 2014-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014156586-A |
| titleOfInvention | Compound, resin, resist composition, and method for producing resist pattern |
| abstract | Disclosed are a compound and a resin used in a resist composition capable of producing a negative resist pattern having excellent line edge roughness (LER). A compound represented by formula (I). [In Formula (I), R 1 represents an alkyl group having 1 to 6 carbon atoms, a hydrogen atom or a halogen atom which may have a halogen atom. R 2 and R 3 each independently represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R 4 represents an alkyl group having 1 to 6 carbon atoms. R 3 and R 4 may form a heterocyclic ring having 2 to 8 carbon atoms together with —C—O— to which they are bonded. A 1 represents a single bond or * -A 2 -X 1 - (A 3 -X 2) a - represents a. A 2 and A 3 each independently represents an alkanediyl group having 1 to 6 carbon atoms. X 1 and X 2 each independently represent —O—, —CO—O— or —O—CO—. a represents 0 or 1. * Represents a bond with an oxygen atom. ] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017095444-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017095688-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016145348-A |
| priorityDate | 2013-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 286.