http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014130965-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fb9f44db08d1c42a53f3d28eaae416f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 2012-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fecbc5acb38a2882e18df7ee26e6566 |
| publicationDate | 2014-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014130965-A |
| titleOfInvention | Polishing liquid composition for silicon wafer |
| abstract | The present invention provides a polishing composition for a silicon wafer, a method for producing a semiconductor substrate using the polishing composition for a silicon wafer, and a silicon wafer, which can reduce surface defects compared to a conventional polishing composition for a silicon wafer. A polishing method is provided. A polishing composition for a silicon wafer of the present invention is represented by a water-soluble polymer compound A which is a cellulose derivative, a structural unit I represented by the following general formula (1), and a general formula (2) below. The mass ratio of the structural unit II is 100: 0 to 40:60, the total mass of the structural unit I and the structural unit II is 50% to 100% of the total mass, and the weight average molecular weight is 4000. A polishing composition for a silicon wafer, comprising 16 million or less water-soluble polymer compound B, a nitrogen-containing basic compound, silica particles, and an aqueous medium. [Chemical 1] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018025655-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018025655-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018216733-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016122803-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7148506-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018216733-A1 |
| priorityDate | 2012-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 67.