http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018216733-A1

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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
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filingDate 2018-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9910d2a9f014e2c531f5fe4e48ac8589
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_523e5f0c7418f04134cf08ce1d859e56
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publicationDate 2018-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2018216733-A1
titleOfInvention Polishing composition and polishing method using same
abstract The present invention provides a polishing composition which is thickened, while maintaining properties such as dispersibility of abrasive grains, polishing rate and reduced haze. The present invention is a polishing composition which contains abrasive grains, a basic compound, a water-soluble polymer A that has a function of protecting the surface of an object to be polished, a water-soluble polymer B that has a thickening function, and water. This polishing composition is configured such that: the weight average molecular weight of the water-soluble polymer B is 50,000 or more; the abrasive grain adsorption parameter 1 of the water-soluble polymer B obtained from a standard test 1 is 40% or less; and the substrate adsorption parameter 2 of the water-soluble polymer B obtained from a standard test 2 is 20% or less.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022202688-A1
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priorityDate 2017-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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