http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014112216-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate | 2013-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2a9aacf507db12b95a8f92ddad3e63f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_670712e4c98df4c464bc1ac57747e207 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 |
| publicationDate | 2014-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2014112216-A |
| titleOfInvention | Resist composition and method for producing resist pattern |
| abstract | An object of the present invention is to provide a resist composition capable of producing a resist pattern with an excellent focus margin. A resin having a structural unit represented by formula (I) and a structural unit represented by formula (a4) and having no acid labile group, a resin having an acid labile group, and A resist composition containing an acid generator represented by the formula (II). [Wherein R 1 and R 3 are a hydrogen atom or a methyl group; R 2 is an alicyclic hydrocarbon group; L 1 is a divalent saturated hydrocarbon group or a single bond; R 4 is a saturated carbon having a fluorine atom. R 23 and R 24 are each a fluorine atom or a perfluoroalkyl group; X 21 is a divalent saturated hydrocarbon group; R 25 is a group containing a cyclic ether structure; Z 1 + represents an organic cation. ] [Selection figure] None |
| priorityDate | 2012-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 322.