| abstract |
Provided are a substrate and a substrate processing method for efficiently forming an internal processing layer by irradiating a small number of laser pulses with a wide range of options for a laser light source, a thin internal processing layer, and a small number of laser pulses. A single crystal substrate includes a modified layer in which a periodic structure having a crystal orientation different from the crystal orientation of the substrate is formed. Periodic structures are connected. [Selection] Figure 4 |