| abstract |
A method for processing a substrate using a laser beam is provided. An environmentally friendly substrate processing method capable of preventing generation of sludge. The substrate processing method generates a first laser beam, and uses a diffractive optical element to generate a plurality of first laser beams. Dividing into a second laser beam, focusing the plurality of divided second laser beams on a plane inside the substrate parallel to the peripheral surface of the substrate, and separating the substrate along the plane inside the substrate Stages can be included. [Selection] Figure 1 |