http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013100471-A

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
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filingDate 2012-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5fdf765c2378e2dd139c2825ad992c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36
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publicationDate 2013-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2013100471-A
titleOfInvention Compound, resin, resist composition, and method for producing resist pattern
abstract An object of the present invention is to provide a compound, a resin, a resist composition, and the like capable of obtaining a resist pattern having a good shape. A compound represented by formula (I), a resin having a structural unit derived from the compound, and a resist composition containing the resin. [Wherein, R 1 and R 2 each represent an aliphatic hydrocarbon group, or R 1 and R 2 are bonded to each other to form a ring; R 3 is an alkyl group optionally having a halogen atom] Etc .; m and n are each 0 or 1; X 1 is a single bond, —O— (CH 2 ) 1 — * (1 is an integer of 1 to 6, * represents a bond with O), etc. Represents] [Selection figure] None
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017207741-A
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priorityDate 2011-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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