abstract |
An object of the present invention is to provide a compound, a resin, a resist composition, and the like capable of obtaining a resist pattern having a good shape. A compound represented by formula (I), a resin having a structural unit derived from the compound, and a resist composition containing the resin. [Wherein, R 1 and R 2 each represent an aliphatic hydrocarbon group, or R 1 and R 2 are bonded to each other to form a ring; R 3 is an alkyl group optionally having a halogen atom] Etc .; m and n are each 0 or 1; X 1 is a single bond, —O— (CH 2 ) 1 — * (1 is an integer of 1 to 6, * represents a bond with O), etc. Represents] [Selection figure] None |