http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012118354-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate | 2010-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2e97d79b8a7b5cd4485ec58cf921ad6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53135825feea025010c811cc5903f1b7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c21b2e24a16528e0370f62937ffa6f03 |
| publicationDate | 2012-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2012118354-A |
| titleOfInvention | Radiation-sensitive resin composition, interlayer insulating film, and method for forming interlayer insulating film |
| abstract | A radiation-sensitive resin composition capable of forming an interlayer insulating film excellent in solvent resistance, heat resistance and transparency, and excellent in sensitivity and developer resistance, and formed from the radiation-sensitive resin composition Provided is an interlayer insulating film and a method for forming the interlayer insulating film. [A] An alkali-soluble resin having a carboxyl group, [B] a quinonediazide compound, and [C] an alkyl ester of (meth) acrylic acid, a fluorinated alkyl ester of (meth) acrylic acid, and a siloxane structure ( A radiation-sensitive resin composition containing a copolymer obtained by copolymerizing at least one unsaturated compound selected from the group consisting of (meth) acrylic acid esters and an epoxy group-containing unsaturated compound. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019156000-A1 |
| priorityDate | 2010-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 574.