http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012059903-A

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filingDate 2010-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f8c1586185836ee961c706b82229f29
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publicationDate 2012-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2012059903-A
titleOfInvention Electromechanical conversion member, liquid discharge head, and image forming apparatus
abstract When an electromechanical conversion film is formed by applying a PZT precursor (sol-gel solution) using a liquid discharge head, film thickness unevenness occurs, causing cracks in the film during heat treatment and defects in electrical characteristics. . A step of partially modifying a surface on an electrode; a sol-gel solution of a metal composite oxide is ejected from a first liquid ejection head onto the electrode and partially coated to form a patterned electro- A step of forming a mechanical conversion film; a step of applying a liquid different from the sol-gel liquid on the electrode by discharging from the second liquid discharge head; and drying, pyrolyzing, and crystallizing the partially applied sol-gel liquid And a step of repeating these steps to obtain a desired film thickness. [Selection] Figure 2
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014177042-A
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