| abstract |
PROBLEM TO BE SOLVED: To provide a manufacturing method in which a device having a ferroelectric layer or a piezoelectric layer having an arbitrary planar shape can be formed more accurately, at low cost and with a short tact time, and a ferroelectric obtained thereby Devices such as body elements and piezoelectric elements are provided. SOLUTION: A step of forming a lower electrode 2 on a substrate 1, a first region A1 having a high affinity for a ferroelectric material or a piezoelectric material on the lower electrode 2, and a first region Forming a second region A2 disposed adjacent to A1 and having a lower affinity for a ferroelectric material or a piezoelectric material than the first region A1, and a ferroelectric in the first region A1 Forming a ferroelectric layer or a piezoelectric layer 7 by supplying a body material or a piezoelectric material, and a device manufacturing method. [Selection] Figure 1 |