| abstract |
An object of the present invention is to provide a method suitable for forming a high-density pattern using two kinds of liquid agents that start reaction upon mixing. A liquid droplet D1 of a first liquid L1 and a liquid droplet D2 of a second liquid L2 are mixed when landing on a substrate 10, and a reaction is started after the liquid droplets D1 and D2 have landed on the substrate 10. Thus, the disadvantage of mixing the two liquids L1 and L2 before use can be avoided to the maximum. Further, since the ink jet method is used, it is possible to finely control the appropriate amount of liquid and the landing position, and the first liquid L1 and the second liquid L2 can be landed at the same position with high accuracy. Therefore, it is advantageous for forming a high-density pattern. Further, since the mixing ratio of the first liquid L1 and the second liquid L2 can be precisely controlled, the quality of the film 11 can be stabilized. [Selection] Figure 1 |