| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2010-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6990198dd6b31314b784d3cde874cbe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ff651eff6fc8ba8d837a5260f894108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41b1f57cd45fff2149f4a1f1492eeb94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c2bdd6dc202dc9e38663ed7bae4c128
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aed3da245984185c752ee62935ace589
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f02a2a66da89d96900d03ac58e43a1e4 |
| publicationDate |
2012-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2012015335-A |
| titleOfInvention |
Protective film forming chemical and wafer surface cleaning method |
| abstract |
Capillary tube of concave / convex pattern portion of wafer for improving a cleaning process that easily induces pattern collapse in a method of manufacturing a wafer having a fine concave / convex pattern on a surface and at least a part of the concave / convex pattern including silicon. It is an object to provide a chemical solution for forming a protective film that reduces the force. A chemical solution for forming a water-repellent protective film on at least the concave surface of the concave / convex pattern when cleaning a wafer having a fine concave / convex pattern on the surface and at least a part of the concave / convex pattern containing silicon. A chemical solution for forming a protective film comprising 0.01 to 30% by mass of a silicon compound A represented by the general formula R 1 a Si (H) b X 4-ab , and an aprotic organic solvent. [Selection] Figure 4 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7328564-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200108887-A
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019138870-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019123860-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10593538-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111512418-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102465276-B1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018137426-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11282709-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018150775-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013115021-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020105340-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111512418-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013161834-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013161833-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11174394-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I707030-B |
| priorityDate |
2010-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |