| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-1612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-63
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-1896
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2018-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a8f8b0bc2364ca6fe941973232b8a30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6990198dd6b31314b784d3cde874cbe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6408ce21db197c68e79a8c34bdcf134b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_841b885f991096829aa89e4d68781b45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f02a2a66da89d96900d03ac58e43a1e4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16b48957c5b83ada781b5ec6d3f98557
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eea986bf96407cf0822e8973c3924fe5 |
| publicationDate |
2019-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2019138870-A1 |
| titleOfInvention |
Chemical agent for forming water repellent protective film and surface treatment method for wafers |
| abstract |
The present invention provides a chemical agent for forming a water repellent protective film, which has further improved water repellency-imparting effect. A chemical agent for forming a water repellent protective film according to the present invention comprises (I) an aminosilane compound which is represented by general formula (1), (II) a silicon compound which is represented by general formula (2), and (III) an aprotic solvent; and the content of the component (I) relative to the total amount of the components (I)-(III) is 0.02-0.5% by mass. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023127942-A1 |
| priorityDate |
2018-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |