http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018150775-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-40 |
| filingDate | 2018-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6990198dd6b31314b784d3cde874cbe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e1bef0ed8cbd93f1d76640fb138e761 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a8f8b0bc2364ca6fe941973232b8a30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eea986bf96407cf0822e8973c3924fe5 |
| publicationDate | 2018-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2018150775-A1 |
| titleOfInvention | Chemical liquid for forming water repellent protective film |
| abstract | This chemical liquid for forming a water repellent protective film contains (I) at least one first solvent which is selected from the group consisting of ether solvents and hydrocarbon solvents, (II) a second solvent which is composed of a glycol ether, (III) a silylating agent represented by general formula [1], and (IV) a base represented by general formula [2] and/or general formula [3]. This chemical liquid for forming a water repellent protective film is configured such that: the concentration of the component (II) relative to the total amount of the chemical liquid is 1-30% by mass; the concentration of the component (III) relative to the total amount of the chemical liquid is 2-15% by mass; the concentration of the component (IV) relative to the total amount of the chemical liquid is 0.05-2% by mass; and the mass ratio (III)/(IV) is 4.5 or more.n(R 1 ) a (H) b Si(OCOR 2 ) 4-a-b t[1]n(R 3 ) c (H) d Si(X) 4-c-d t[2]n[(R 4 ) e (H) f Si] 2 NHt[3]nIf this chemical liquid is used as a member to be in contact with a liquid in a cleaning device for wafers that contain a vinyl chloride resin, this chemical liquid is capable of exerting suppression of swelling of the vinyl chloride resin, suppression of discoloration of the vinyl chloride resin and suppression of precipitation of solids in the chemical liquid in a balanced manner. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7292020-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020035793-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I807086-B |
| priorityDate | 2017-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.