| abstract |
To provide a salt as an acid generator that provides a chemically amplified resist composition exhibiting high resolution. A salt represented by the formula (I): (In formula (I), Q < 1 >, Q < 2 > represents a fluorine atom or a C1-C6 perfluoroalkyl group mutually independently, X is a C1-C30 acyclic hydrocarbon, monocyclic, or bicyclic ring Represents a divalent or trivalent residue of a hydrocarbon having 3 to 30 carbon atoms, and these hydrocarbons may contain an ether bond, A + represents an organic counter ion, Y represents a hydroxyl group, and cyano. Represents a group or a methoxy group, and n represents an integer of 1 to 2. X in the formula is an alkoxy group having 1 to 6 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxyalkyl group having 1 to 6 carbon atoms. , One or more of a hydroxyl group or a cyano group may be contained as a substituent.) [Selection figure] None |