| abstract |
As a radiation-sensitive acid generator or a thermal acid generator, the combustibility is relatively high, there is no problem in the accumulation in the human body, and the acidity and boiling point of the generated acid are sufficiently high, and in the resist film. The present invention provides a novel acid generator having a suitably short diffusion length and a small dependence on a mask pattern, and a positive or negative radiation-sensitive resin composition containing the acid generator. An acid generator has a structure represented by the following general formula (I). [However, R represents a monovalent organic group, a nitro group, a cyano group or a hydrogen atom having a fluorine content of 50% by weight or less, and Z 1 and Z 2 each represent a fluorine atom or a perfluoroalkyl group. ] In addition to the acid generator, the radiation-sensitive resin composition contains an acid-dissociable group-containing resin in the positive type, or contains an alkali-soluble resin and an alkali-solubility controlling agent in the positive type, and crosslinks with the alkali-soluble resin in the negative type. Agent. [Selection diagram] None |