| abstract |
PROBLEM TO BE SOLVED: To provide high transparency in a wide wavelength range, that is, from a vacuum ultraviolet ray to an optical communication wavelength range, and have high adhesion to a substrate and high film formability while having a high fluorine content. A novel polymerizable monomer having the same, a polymer compound using the same, and an antireflection material, an optical device material, and a resist material coated with the polymer compound are provided. SOLUTION: A series of novel fluorine-containing acrylate derivatives as specific compounds having a high fluorine content and a hydroxyl group, polymer compounds using these monomers, and antireflection materials using the polymer compounds , Optical device materials, resist materials. |