| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-108 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F2-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F20-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C35-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C35-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D133-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-10 |
| filingDate |
2004-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2007-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007520587-A |
| titleOfInvention |
Low polydispersity photoimageable acrylic polymers, photoresists and methods for microlithography |
| abstract |
The present invention relates to low polydisperse acrylic polymers useful in photoimaging and photoresist compositions, and to photoimaging methods using these compositions. The low polydispersity polymers of the present invention are produced using controlled radical polymerization (CRP) techniques, such as RAFT (Reversible Addition Fragmentation Chain Transfer) polymerization. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019181228-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007091882-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016026313-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015135492-A |
| priorityDate |
2003-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |