| abstract |
(57) [Problem] To solve the problem of the performance improvement technology inherent in the microphotofabrication using far ultraviolet light, particularly ArF excimer laser light, and excellent in sensitivity, resolution and exposure margin. To provide a positive photosensitive composition. A positive-working compound containing a compound that generates an acid upon irradiation with actinic rays or radiation, a resin having a specific alicyclic hydrocarbon structure, and decomposing by the action of an acid to increase the solubility in an alkaline developer. Photosensitive composition. |