| abstract |
(57) [Problem] To provide a chemically amplified positive resist composition which has various resist properties such as sensitivity and resolution, and has excellent adhesion to a substrate. A chemically amplified positive resist composition containing a resin component and an acid generator, wherein the resin component is: It has a polymerized unit of 2-alkyl-2-adamantyl (meth) acrylate and a polymerized unit (III) of 3-hydroxy-1-adamantyl (meth) acrylate and / or a polymerized unit (III) of (meth) acrylonitrile ), And optionally further comprising a polymerized unit (IV) of α-methacryloyloxy-γ-butyrolactone and / or a polymerized unit (V) of maleic anhydride. A composition is also provided in which the component has a polymerized unit of 2-ethyl-2-adamantyl methacrylate and further has one or more of (II) to (V). |