http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000122296-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e415f6f1eeb8706d299ea086326248bf
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-114
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
filingDate 1999-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73828044dc2d0a78711a35b7eeda0e80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_777b85a9c0e8fc8f6b1e2c7339d39008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1977e056bbd609c1125724b23c60f397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8618f918d8adf06454fff46dc5307760
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0323cc0f8744d02afb65c1585dd8546a
publicationDate 2000-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2000122296-A
titleOfInvention Photoresist compositions, methods thereof and industrial products containing them
abstract (57) Abstract: The present invention relates to a shelf life. And a novel photoresist composition having significantly improved lithographic properties. SOLUTION: The present invention provides a solvent having no hydroxy group (for example, a non-hydroxylic solvent), a resin binder, and a sulfonium photoacid generator compound having sufficient solubility in the solvent (photoacid generator). A photoresist composition comprising r compound (PAG). These resists have very good storage stability. For example, even after being stored for a long period of time, the photospeed d) hardly changes.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007067199-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2101217-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2003007079-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7511169-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6849384-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002023353-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7928262-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9223205-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8062828-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7312014-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8048610-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8900796-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2112554-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101038122-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0208833-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7569324-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2090931-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2033966-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7569326-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8105748-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8057985-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I382992-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7556909-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7527912-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8039198-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8030515-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8114571-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7531290-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100339767-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2634631-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101153593-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03007079-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7919226-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8609889-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130098920-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7670751-B2
priorityDate 1998-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09222732-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1010715-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11167200-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1039500-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1048814-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000029215-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1087724-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425829127
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578737
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513873
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415737911
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419509562
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12022
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11032
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1099
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22057345
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19660
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2723671
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53429910
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456171974
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11040
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7946
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18358944
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21977712
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411855397
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393770
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9552
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15458
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2724016
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426127381
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424671210
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID430893211
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3283
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448674543
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450090653
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421813552
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410503276
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID166984
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414865512
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414808596
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67815
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419588021
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409500530
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414867537
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448959915
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458427722
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22590809
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420171292
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15680
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397310
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11775
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14359749
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421348734
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453284053
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410491876
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421200475
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21889463
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420299245
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452783546
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419567200
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419769253
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76113
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457834974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410518562
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453080448
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62453
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410519909
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559376
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419596525
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74483
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450809899
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21584169
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID59513267
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8902
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3680404
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61344
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513585
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16760155
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID138202
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414878281
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22389929
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452764334
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453160086
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415754378
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456500829
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449011639
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420739760
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414223155
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21930728
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6999133
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21889485
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3015009
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419566679
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415758737
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407914953
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454518504
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87522894
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3855171
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559261
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22178986
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457623688
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11729320
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394811
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5801
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID86761095
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526573
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23498378
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412232844
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413371364
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74558
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13583
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67734
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11148864
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12099100

Total number of triples: 173.