| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1374dd16777534b65ad4422333245af8 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29K67-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29L7-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C55-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J5-18 |
| filingDate |
1998-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c9efbe008c98c6114a13f67c7ed899b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_705b9e3f5d778cdb9938b6ae0606da95 |
| publicationDate |
2000-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2000094507-A |
| titleOfInvention |
Polyester film |
| abstract |
(57) [Problem] To provide an excellent substrate followability with respect to irregularities when used as a support layer of a photoresist film for providing a circuit on a substrate having fine irregularities. Another object of the present invention is to provide a film having high transparency and a low film haze, which can prevent the occurrence of circuit defects. SOLUTION: The present invention is a biaxially oriented film comprising a polyester in which trimethylene terephthalate units are 80 mol% or more of all repeating units, and the film has a plane orientation coefficient (ns) of 0.030 or more and 0.115 or less. A polyester film for a support layer of a photoresist film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4595254-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005208635-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008529080-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003050462-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002082444-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4699482-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1266923-A4 |
| priorityDate |
1998-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |