http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005208635-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 |
| filingDate | 2005-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f2b75c99fda4e28000da74a45b571a5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f9fe4dd3b36c5a40471080af12a4ecf3 |
| publicationDate | 2005-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005208635-A |
| titleOfInvention | Resist pattern, resist pattern laminated substrate, wiring pattern manufacturing method, and wiring pattern |
| abstract | A photosensitive element having a resist pattern with excellent side-grayness, top-surface flatness, resolution, adhesion, and alkali developability and a small amount of mouth bite. A layer of a photosensitive resin composition is laminated on a circuit forming substrate, irradiated with an actinic ray in an image form, an exposed portion is photocured, and an unexposed portion is removed by development. In the resist pattern manufactured through the steps, the photosensitive resin composition comprises (A) a carboxyl group-containing binder polymer, (B) a photopolymerizable compound containing bisphenol A-based (meth) acrylate, and (C) 2, 4 , 5-triarylimidazole dimer, a photosensitive resin composition containing a photopolymerization initiator, wherein the unevenness on the side surface of the resist pattern is 0 to 3.0 μm. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009123096-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011179853-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016130913-A |
| priorityDate | 1999-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 155.