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filingDate 2017-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2018-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-3279729-A1
titleOfInvention Negative resist composition and resist pattern forming process
abstract A negative resist composition comprising (A) a sulfonium compound of betaine type and (B) a polymer is provided. The resist composition is effective for controlling acid diffusion during the exposure step, exhibits a very high resolution during pattern formation, and forms a pattern with minimal LER.
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