| abstract |
It is to propose an internal member for a plasmantreating vessel having excellent resistances to chemicalncorrosion and plasma erosion under an environmentncontaining a halogen gas and an advantageous method ofnproducing the same, which is a member formed by covering ansurface of a substrate with a multilayer composite layernconsisting of a metal coating formed as an undercoat, Al 2 O 3 nfilm formed on the undercoat as a middle layer and Y 2 O 3 nsprayed coating formed on the middle layer as a top coat. |