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publicationDate 2001-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-1158072-A2
titleOfInvention Halogen gas plasma-resistive members and method for producing the same, laminates, and corrosion-resistant members
abstract A halogen gas plasma-resistant member to be exposed to a halogen gasnplasma, includes a main body of said member, and a corrosion-resistant filmnformed at least a surface of said main body, wherein a peeling resistance of thencorrosive film to said main body is not less than 15 MPa.
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