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filingDate 2003-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2011-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-101030935-B1
titleOfInvention Thermal Spray Yttria-Containing Coatings for Plasma Reactors
abstract Components of the semiconductor processing apparatus include a sprayed yttria containing coating that provides erosion, corrosion and / or corrosion-erosion resistance in a plasma atmosphere. This coating can protect the substrate from physical and / or chemical attack. n n Semiconductor, Plasma, Yttria, Thermal Spray Coating, Erosion Resistance
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