http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9967056-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9d91b2f9432de1bcf3290473f7a3e96c
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-00
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
filingDate 1999-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2412b05366aa0ab4bf3463d8f1bb027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a6d9604d18b2ccbdce1c39e9285e420
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d99bd1edd3274de27fe6b659063469b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_412296c2f999b3eff079cdfb7593e31d
publicationDate 1999-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-9967056-A1
titleOfInvention Composition for the chemical mechanical polishing of metal layers
abstract A composition for CMP and a method for using the same, whereas the chemical mechanical polishing slurry composition comprises: a fluorine-containing compound, an abrasive and water. Optionally, an oxidizer and a carboxylic acid can be used as additives in the slurry composition. The resulting slurry is especially useful for the polishing of tantalum and copper layers on a substrate.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10103058-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006028759-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7253111-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10566211-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010025623-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9589835-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9548228-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1217651-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9978610-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1323798-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10395944-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9972504-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100396881-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/SG-109480-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10256142-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7132058-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014017891-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10982114-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9653353-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7018560-B2
priorityDate 1998-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5700383-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5836806-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5934980-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5516346-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406399
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406400
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226395968
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16773
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226396020
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8892
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226422505
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8094
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226395715
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID379
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13859969
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127823653
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87060181
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID227968920
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6131
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8158

Total number of triples: 58.