| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A47J2037-0795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A47J37-0786 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A47J37-0713
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
2004-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d10c066f8f78607802c47b4467619242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3590646e4766f076961330f8991890d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be2c1952c8adf91e551286146c61dfe9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_953fc1255eebb95e564f1a563326bfc2 |
| publicationDate |
2007-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7253111-B2 |
| titleOfInvention |
Barrier polishing solution |
| abstract |
The polishing solution is useful for preferentially removing barrier materials in the presence of nonferrous interconnect metals with limited erosion of dielectrics. The polishing solution comprises 0 to 20 weight percent oxidizer, at least 0.001 weight percent inhibitor for reducing removal rate of the nonferrous interconnect metals, 10 ppb to 4 weight percent complexing agent, 0 to 50 weight percent abrasive and balance water; and the solution having a pH of less than 7. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007161528-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9275899-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016053384-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9365934-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7534753-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009087989-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011111595-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8025813-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9771550-B2 |
| priorityDate |
2004-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |