http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004009671-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3082cd39bb800686b9abbb8aa05c80b
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
filingDate 2003-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57499dea4a8015463a78a49f502ecff8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_629804165d4fc3d2c82d4a61e067005a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e45d419b136aaf62edab29ec45ddee1a
publicationDate 2004-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2004009671-A1
titleOfInvention Chemical mechanical polishing slurry useful for copper substrates
abstract A chemical mechanical polishing slurry comprising an oxidizing agent, a complexing agent, an abrasive, and an optional surfactant, as well as a method for using the chemical mechanical polishing slurry to remove copper alloy, titanium, titanium nitride, tantalum and tantalum nitride containing layers from a substrate. The slurry does not include a separate film-forming agent.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7452815-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8057561-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1568746-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008167209-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005085163-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7427362-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005191823-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1951837-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1951837-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005227491-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006172526-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005062016-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7465668-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6930054-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7253111-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004244911-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008315154-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008315153-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6953389-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006163530-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006175296-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005236601-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2869456-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7718536-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8070843-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010184293-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006286805-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8314031-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8501027-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008233836-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004035354-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7524801-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8038901-B2
priorityDate 1998-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6063306-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5735963-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5340370-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5783489-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5700383-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5922091-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5209816-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5575885-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5527423-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4671851-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4956313-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5980775-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5800577-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6432828-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5575837-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5858813-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4944836-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5137544-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5354490-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-3385682-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5476606-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4086176-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6316366-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5958288-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6620037-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5770095-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5157876-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6068787-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6046110-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5391258-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID612
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448947188
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3423265
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID447315
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226400006
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419584604
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5798
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23978
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408344343
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127723714
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226399628
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129814713
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415737113
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6585
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457765275
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61018
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474094
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453253805
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23963
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559362
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID26250
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226397562
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID867
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76284
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16773
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411581203
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13828328
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226501874
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6131
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451818717
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226397561
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3806114
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID784
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128375819
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474255
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15361785
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393946
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID136076721
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7222
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID176
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93091
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7220
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16700
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226422505
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526621
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31294
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67536
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9989226
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447983024
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57175997
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520403
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419490743
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418354341
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474445
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23956
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559477
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406399
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406400
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID417109324
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14796
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447653313
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14213
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87060181
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID311
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226411955
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406903350
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520344
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474387
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82832
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416641266
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450864287
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID971

Total number of triples: 158.