abstract |
A thermosetting anti-reflective coating and method for making and using the same is disclosed for a broad range of exposure wave-lengths, said coating containing an active curing catalyst, ether or ester linkages derived from epoxy functionality greater than 2.0, a dye-grafted hydroxyl-functional oligomer, and an alkylated aminoplast cross-linking agent, all present in a low-to-medium alcohol-containing solvent. |