| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_01e48e78fadaaec045333f9ad5a6e0b5 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31942
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31862
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31504
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31667 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L61-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-111 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D179-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D133-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D167-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D101-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L61-28 |
| filingDate |
2000-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad180065d551c7be655d5e3854b47229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e1c4b1c5b18c1e2db1e0aa96af420c8 |
| publicationDate |
2002-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6399686-B1 |
| titleOfInvention |
Anti-reflective coating compositions comprising polymerized aminoplasts |
| abstract |
Improved anti-reflective coating compositions for use in integrated circuit manufacturing processes and methods of forming these compositions are provided. Broadly, the compositions are formed by heating a solution comprising a compound including specific compounds (e.g., alkoxy alkyl melamines, alkoxy alkyl benzoguanamines) under acidic conditions so as to polymerize the compounds and form polymers having an average molecular weight of at least about 1,000 Daltons. The monomers of the resulting polymers are joined to one another via linkage groups (e.g., -CH2-,-CH2-O-CH2-) which are bonded to nitrogen atoms on the respective monomers. The polymerized compound is mixed with a solvent and applied to a substrate surface after which it is baked to form an anti-reflective layer. The resulting layer has high k values and can be formulated for both conformal and planar applications. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003180559-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008032229-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6852421-B2 |
| priorityDate |
2000-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |