http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021131453-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6821349e83f8714103cf65b3fc17c317 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-30 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-0073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D17-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26 |
| filingDate | 2020-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e529bf95cf70a5efe2ae4926e3f351f |
| publicationDate | 2021-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2021131453-A1 |
| titleOfInvention | Cleaning liquid and cleaning method |
| abstract | The present invention provides a cleaning liquid exhibiting excellent cleaning performance and corrosion prevention performance when used as a cleaning liquid after performing chemical-mechanical polishing on a semiconductor substrate including a cobalt-containing substance. In addition, provided is a method for cleaning a semiconductor substrate on which chemical-mechanical polishing has been performed. A cleaning liquid according to the present invention is used for a semiconductor substrate on which chemical-mechanical polishing has been performed, contains at least one amine compound Y0 selected from the group consisting of a compound Y1 represented by general formula (Y1) and a compound Y2 having a 1, 4-butanediamine skeleton, and has a pH of 8.0-11.0. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7290195-B1 |
| priorityDate | 2019-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 280.