http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018507540-A

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filingDate 2016-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2018-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2018507540-A
titleOfInvention Cleaning composition and method for cleaning semiconductor wafer after CMP
abstract The present invention provides a composition for cleaning contaminants from a semiconductor wafer after chemical mechanical polishing. The cleaning composition includes one or more quaternary ammonium hydroxides, one or more organic amines, one or more metal inhibitors, and water. The present invention also provides a method of using the cleaning composition. [Selection] Figure 3
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